Designing Heating Zones in a Wafer Heater for Better Thermal Balance

https://industrial-heat-guide.westhavenscope.com/posts/wafer-heater-materials-and-construction-what-engineers-should-know

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result